Fabrication of Cylindrical Nanopores and Nanopore Arrays in...

Journal of Microelectromechanical Systems 2007 / 12 Vol. 16; Iss. 6

Fabrication of Cylindrical Nanopores and Nanopore Arrays in Silicon-On-Insulator Substrates

Petrossian, Leo, Wilk, Seth J., Joshi, Punarvasu, Hihath, Sahar, Goodnick, Stephen M., Thornton, Trevor J.
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.908435
Date:
December, 2007
File:
PDF, 696 KB
english, 2007
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