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[IEEE 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Berlin, Germany (2009.05.10-2009.05.12)] 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Low-k wafer scribing using water jet-guided laser technology with 10 ns lasers
Pauchard, A., Obi, S., Lee, K., Richerzhagen, B.Year:
2009
Language:
english
DOI:
10.1109/asmc.2009.5155968
File:
PDF, 656 KB
english, 2009