Sensitivity Improvement of Micromachined Convective...

Journal of Microelectromechanical Systems 2012 / 06 Vol. 21; Iss. 3

Sensitivity Improvement of Micromachined Convective Accelerometers

Bahari, Jamal, Jones, John Dewey, Leung, Albert M.
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Volume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2189366
Date:
June, 2012
File:
PDF, 1.51 MB
english, 2012
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