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[IEEE 50th Annual Device Research Conference - Cambridge, MA (June 22-24, 1992)] 50th Annual Device Research Conference - A New Failure Mechanism And Its Improvement On Gate Oxide Reliability At Field Edge By Locos Isoiation
Takahashi, M., Uchida, H., Nagatomo, Y., Hirashita, N., lno, M.Year:
1992
DOI:
10.1109/drc.1992.671905
File:
PDF, 124 KB
1992