Sapphire Substrate Liftoff With Photoelectrochemical...

IEEE Photonics Technology Letters 2011 / 05 Vol. 23; Iss. 10

Sapphire Substrate Liftoff With Photoelectrochemical Etching for Vertical Light-Emitting Diode Fabrication

Lin, Cheng-Hung, Chen, Chih-Yen, Liao, Che-Hao, Hsieh, Chieh, Kiang, Yean-Woei, Yang, Chih-Chung
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Volume:
23
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/lpt.2011.2121899
Date:
May, 2011
File:
PDF, 820 KB
english, 2011
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