Electrostatically tunable piezoelectric-on- silicon...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2012 / 03 Vol. 59; Iss. 3

Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock

Serrano, D. E., Tabrizian, R., Ayazi, F.
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Volume:
59
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2012.2204
Date:
March, 2012
File:
PDF, 1.84 MB
english, 2012
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