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Electrostatically tunable piezoelectric-on- silicon micromechanical resonator for real-time clock
Serrano, D. E., Tabrizian, R., Ayazi, F.Volume:
59
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2012.2204
Date:
March, 2012
File:
PDF, 1.84 MB
english, 2012