[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - Low voltage electrostatic 90° turning flap for reflective MEMS display
Jutzi, Fabio, Gueissaz, Francois, Noell, Wilfried, de Rooij, Nico F.Year:
2010
Language:
english
DOI:
10.1109/omems.2010.5672177
File:
PDF, 1.18 MB
english, 2010