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[IEEE 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Santa Fe, NM, USA (6-8 June 1994)] Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) - Recent Results From A Large-scale Plasma Source Ion Implantation Experiment
Wood, B.P., Henins, I., Reass, W.A., Faehl, R.J., Rej, D.J., Nastasi, M.A., Walter, K.C.Year:
1994
Language:
english
DOI:
10.1109/plasma.1994.588984
File:
PDF, 255 KB
english, 1994