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[IEEE 2014 IEEE International Ultrasonics Symposium (IUS) - Chicago, IL, USA (2014.9.3-2014.9.6)] 2014 IEEE International Ultrasonics Symposium - Highly c-axis oriented monocrystalline Pb(Zr, Ti)O3 based thin film on Si wafer by sputter deposition with fast cooling process
Hanzawa, Hiroaki, Yoshida, Shinya, Wasa, Kiyotaka, Tanaka, ShujiYear:
2014
Language:
english
DOI:
10.1109/ULTSYM.2014.0222
File:
PDF, 486 KB
english, 2014