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[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Universal concept for fabricating micron to millimeter sized 3-D parylene structures on rigid and flexible substrates
Guo-Hua Feng,, Eun Sok Kim,Year:
2003
Language:
english
DOI:
10.1109/memsys.2003.1189819
File:
PDF, 319 KB
english, 2003