[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Close-loop self-compensation of the coupling error for silicon micromachined gyroscope
Jianbin Su,, Dingbang Xiao,, Xuezhong Wu,, Zhihua Chen,, Zhanqiang Hou,Year:
2013
Language:
english
DOI:
10.1109/nems.2013.6559893
File:
PDF, 607 KB
english, 2013