[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Annealing effects on structural and electrical properties of micro heater conductor element
Hamid, Norihan Abdul, Majlis, Burhanuddin Yeop, Yunas, Jumril, Dehzangi, ArashYear:
2013
Language:
english
DOI:
10.1109/rsm.2013.6706477
File:
PDF, 498 KB
english, 2013