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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Iridium Silicide: a Promising Electrode for Metallic Source/Drain in Decananometer MOSFETs
Larrieu, Guilhem, Dubois, Emmanuel, Wallart, Xavier, Katcki, JerzyVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2356271
File:
PDF, 248 KB
english, 2006