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The Etching Characteristics of (100) GaAs by K[sub 2]S[sub 2]O[sub 8] -H[sub 2]O System
Chen, Jiahn-AnnVolume:
132
Year:
1985
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2113714
File:
PDF, 1.15 MB
english, 1985