Large-signal time-domain modeling of low-pressure rf glow...

Large-signal time-domain modeling of low-pressure rf glow discharges

Barnes, Michael S., Cotler, Tina J., Elta, Michael E.
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Volume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.338804
File:
PDF, 1.20 MB
english, 1987
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