Crystal-Orientation Dependent Etch Rates and a Trench Model...

Crystal-Orientation Dependent Etch Rates and a Trench Model for Dry Etching

Ulacia F., J. Ignacio
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Volume:
135
Year:
1988
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2096045
File:
PDF, 854 KB
english, 1988
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