[IEEE 2011 Semiconductor Conference Dresden (SCD) -...

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[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - Reliability investigations on stacked chip on MEMS

Kaulfersch, Eberhard, Winkler, Thomas, Bramer, Birgit, Hammacher, Jens
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Year:
2011
Language:
english
DOI:
10.1109/scd.2011.6068761
File:
PDF, 2.87 MB
english, 2011
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