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[Japan Soc. Applied Phys 2003 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (10-12 June 2003)] 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) - Direct measurement of the inversion charge in MOSFETs: application to mobility extraction in alternative gate dielectrics
Kerber, A., Cartier, E., Ragnarsson, L.A., Rosmeulen, M., Pantisano, L., Degraeve, R., Kim, Y., Groeseneken, G.Year:
2003
Language:
english
DOI:
10.1109/vlsit.2003.1221134
File:
PDF, 178 KB
english, 2003