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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Reducing arsenic to germanium cross contamination with isotopically enriched SDS /sup 72/GeF/sub 4/
Rendon, M.J., Locke, J., Brown, B., Kamenitsa, D.Year:
2000
Language:
english
DOI:
10.1109/.2000.924251
File:
PDF, 392 KB
english, 2000