ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - (Invited) XPS Study on Chemical Bonding States of high-κ/high-μ Gate Stacks for Advanced CMOS
Nohira, Hiroshi, Komatsu, Arata, Yamashita, Koji, Kakushima, Kuniyuki, Iwai, Hiroshi, Hoshi, Yusuke, Sawano, Kentarou, Shiraki, YasuhiroYear:
2011
Language:
english
DOI:
10.1149/1.3633293
File:
PDF, 1.06 MB
english, 2011