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Effect of pulsed bias on the properties of ZrN/TiZrN films deposited by a cathodic vacuum arc
Zhang, Guo-Ping, Wang, Xing-Quan, Lü, Guo-Hua, Zhou, Lan, Huang, Jun, Chen, Wei, Yang, Si-ZeVolume:
22
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/22/3/035204
Date:
March, 2013
File:
PDF, 835 KB
english, 2013