Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators
Lee, Hyung Kyu, Melamud, Renata, Kim, Bongsang, Hopcroft, Matthew A., Salvia, James C., Kenny, Thomas W.Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2168083
Date:
December, 2011
File:
PDF, 1.32 MB
english, 2011