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[IEEE 17th International Symposium on Discharges and Electrical Insulation in Vacuum - Berkeley, CA, USA (21-26 July 1996)] Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum - Investigation of low pressure discharge generated by magnetron plasma device
Elistratov, N.G., Titov, K.A., Zimin, A.M.Volume:
2
Year:
1996
Language:
english
DOI:
10.1109/DEIV.1996.545979
File:
PDF, 429 KB
english, 1996