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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - High fill-factor two-axis analog micromirror array for 1×N/sup 2/ wavelength-selective switches
Jui-Che Tsai,, Huang, S., Wu, M.C.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290532
File:
PDF, 272 KB
english, 2004