[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Evaluation and optical control of somatic muscle micro bioactuator of channelrhodopsin transgenic Drosophila melanogaster

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