[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Surface acoustic wave linear motor for two-dimensional optical positioning system
Xing, Yumei., Li, Yigui, Zhang, Junfeng, Gao, GaoyangYear:
2009
Language:
english
DOI:
10.1109/nems.2009.5068641
File:
PDF, 6.34 MB
english, 2009