[IEEE 2009 IEEE 3rd International Conference on...

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[IEEE 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering (NANOMED) - Tainan, Taiwan (2009.10.18-2009.10.21)] 2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering - Study of the annealing effect of low-temperature oxide on the etch rate in TMAH solutions for micro-heater applications

Huang, Wen-Chie, Chen, Chung-Nan, Shen, Shang-Hung, Chen, Cheng-Chia
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Year:
2009
Language:
english
DOI:
10.1109/nanomed.2009.5559093
File:
PDF, 1.52 MB
english, 2009
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