[Japan Soc. of Appl. Phys Digest of Papers Microprocesses...

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[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Most efficient alternative as a way of sub-80 nm contact holes and trenches formation

Jung Hwan Hah,, Jin-Young Yoon,, Hata Mitsuhiro,, Hyun-Woo Kim,, Sang-Gyun Woo,, Han-Ku Cho,, Woo-Sung Han,
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Year:
2003
Language:
english
DOI:
10.1109/imnc.2003.1268495
File:
PDF, 105 KB
english, 2003
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