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A Novel Micromachining Process Using DRIE, Thermal Oxidation, Electroplating, and Planarization to Create High Aspect Ratio Coplanar Waveguides
Todd, Shane T., Huang, Xiaojun T., Bowers, John E., MacDonald, Noel C.Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2009.2036745
Date:
February, 2010
File:
PDF, 1.09 MB
english, 2010