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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Surface-micromachined resonant accelerometer
Roessig, T.A., Howe, R.T., Pisano, A.P., Smith, J.H.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/sensor.1997.635237
File:
PDF, 848 KB
english, 1997