[IEEE 1997 IEEE International Conference on Microelectronic...

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[IEEE 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Monterey, CA, USA (17-20 March 1997)] 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Test structures for characterising a damascene CMP interconnect process

Peyne, C.M., O'Hara, A., Stevenson, J.T.M., Elliott, J.P., Walton, A.J., Fallon, M.
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Year:
1997
Language:
english
DOI:
10.1109/icmts.1997.589369
File:
PDF, 871 KB
english, 1997
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