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Development of a High-Performance Microelectrostatic Repulsive-Force Rotation Actuator
Siyuan He,, Ben Mrad, R, Chang, J SVolume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2010.2045342
Date:
June, 2010
File:
PDF, 749 KB
english, 2010