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[IEEE 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2014.7.2-2014.7.4)] 2014 21st International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Growth of hydrogenated microcrystalline silicon thin films using electron cyclotron resonance chemical deposition method
Chang, Teng-Hsiang, Chu, Yen-Ho, Lee, Chien-Chieh, Chang, Jenq-Yang, Li, Tomi T., Chen, I-ChenYear:
2014
Language:
english
DOI:
10.1109/am-fpd.2014.6867180
File:
PDF, 646 KB
english, 2014