[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - A micromirror scanner with vertical combs tilted by assembly process
Min-Ho Jun,, Sungsik Yun,, Man Geun Kim,, Sung-Kil Lee,, Jong-Hyun Lee,Year:
2008
Language:
english
DOI:
10.1109/OMEMS.2008.4607871
File:
PDF, 407 KB
english, 2008