[IEEE Technical Digest. IEEE International MEMS 99...

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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - A fully-packaged electromagnetic microrelay

Tilmans, H.A.C., Fullin, E., Ziad, H., Van de Peer, M.D.J., Kesters, J., Van Geffen, E., Bergqvist, J., Pantus, M., Beyne, E., Baert, K., Naso, F.
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Year:
1999
Language:
english
DOI:
10.1109/memsys.1999.746746
File:
PDF, 1001 KB
english, 1999
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