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Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer
Färm, Elina, Kemell, Marianna, Santala, Eero, Ritala, Mikko, Leskelä, MarkkuVolume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3250936
File:
PDF, 473 KB
english, 2010