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[IEEE 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Honolulu, HI, USA (June 13-15, 2006)] 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers. - Integration of Local Stress Techniques with Strained-Si Directly on Insulator (SSDOI) Substrates
Yin, H., Ren, Z., Chen, H., Holt, J., Liu, X., Sleight, J., Rim, K., Chan, V., Fried, D., Kim, Y., Chu, J., Greene, B., Bedell, S., Pfeiffer, G., Bendernagel, R., Sadana, D., Kanarsky, T., Sung, C., IYear:
2006
Language:
english
DOI:
10.1109/vlsit.2006.1705224
File:
PDF, 291 KB
english, 2006