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[IEEE 2007 International Workshop on Junction Technology - Kyoto, Japan (2007.06.8-2007.06.9)] 2007 International Workshop on Junction Technology - Study of Ultra-shallow Junctions Formed by Flash Lamp Annealing to Reveal Dopant Activation Phenomenon
Kato, Shinichi, Aoyama, Takayuki, Onizawa, Takashi, Nara, Yasuo, Ohji, YuzuruYear:
2007
Language:
english
DOI:
10.1109/iwjt.2007.4279970
File:
PDF, 3.95 MB
english, 2007