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[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system
Shih-Che Hung,, Shu-Chia Shiu,, Cha-Hsin Chao,, Ching-Fuh Lin,Year:
2008
Language:
english
DOI:
10.1109/omems.2008.4607860
File:
PDF, 235 KB
english, 2008