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[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - High-K metal gate contact process optimization for yield improvement via innovative defect inspection technique
Lan, Polly, Jung Yan Yang,, Chen, Garry, Pai, White, Lin, Mahatma, Hsieh, Archer, Chen, Sam, Huang, Eros, Cheng, Harvey, Kwok Ng,Year:
2014
Language:
english
DOI:
10.1109/asmc.2014.6846964
File:
PDF, 318 KB
english, 2014