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Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing Methods
Huang, Chi-Chieh, Zeng, Xuefeng, Jiang, HongruiVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2184085
Date:
June, 2012
File:
PDF, 783 KB
english, 2012