[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Bordeaux, France (2010.04.26-2010.04.28)] 2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE) - Fabrication of freestanding thin Pt/W thermocouple by Joule heat welding
Tohmyoh, Hironori, Takeda, Hironao, Khan, Mohammed N. I., Saka, MasumiYear:
2010
Language:
english
DOI:
10.1109/esime.2010.5464556
File:
PDF, 941 KB
english, 2010