Fabrication and Characterization of Micromachined...

Journal of Microelectromechanical Systems 2013 / 02 Vol. 22; Iss. 1

Fabrication and Characterization of Micromachined Piezoelectric T-Beam Actuators

Mateti, Kiron, Zhang, Zheqian, Rahn, Christopher D., Tadigadapa, Srinivas
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2221682
Date:
February, 2013
File:
PDF, 1.16 MB
english, 2013
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