[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Novel Electroplating-Based Technology for the Fabrication of Giant Micromirrors for Space and Terrestrial Applications
Ilias, S., Topart, P., Leclair, S., Cote, J., Loic Le Noc,, Picard, F., Jerominck, H.Year:
2004
DOI:
10.1109/icmens.2004.1508956
File:
PDF, 2.74 MB
2004