[IEEE 2004 International Conference on MEMS, NANO and Smart...

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[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Novel Electroplating-Based Technology for the Fabrication of Giant Micromirrors for Space and Terrestrial Applications

Ilias, S., Topart, P., Leclair, S., Cote, J., Loic Le Noc,, Picard, F., Jerominck, H.
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Year:
2004
DOI:
10.1109/icmens.2004.1508956
File:
PDF, 2.74 MB
2004
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