Novel single-poly EEPROM with damascene control-gate...

IEEE Electron Device Letters 2005 / 10 Vol. 26; Iss. 10

Novel single-poly EEPROM with damascene control-gate structure

Hung-Cheng Sung,, Tan Fu Lei,, Te-Hsun Hsu,, Wang, S.W., Ya-Chen Kao,, Yung-Tao Lin,, Wang, C.S.
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Volume:
26
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2005.856014
Date:
October, 2005
File:
PDF, 263 KB
english, 2005
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