[IEEE 2013 IEEE Regional Symposium on Micro and...

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[IEEE 2013 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Daerah Langkawi, Malaysia (2013.09.25-2013.09.27)] RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics - Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications

Mirza, A., Hamid, N. H., Khir, M. H. Md., Dennis, J. O., Ashraf, K., Jan, M. T., Shoaib, M.
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Year:
2013
Language:
english
DOI:
10.1109/rsm.2013.6706475
File:
PDF, 353 KB
english, 2013
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