Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2004 / 03 Vol. 520; Iss. 1-3
Development of ultra-low impedance Through-wafer Micro-vias
Finkbeiner, F.M., Adams, C., Apodaca, E., Chervenak, J.A., Fischer, J., Doan, N., Li, M.J., Stahle, C.K., Brekosky, R.P., Bandler, S.R., Figueroa-Feliciano, E., Lindeman, M.A., Kelley, R.L., Saab, T.,Volume:
520
Language:
english
Pages:
3
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2003.11.373
Date:
March, 2004
File:
PDF, 178 KB
english, 2004