[IEEE 2010 IEEE 2nd Russia School and Seminar on Fundamental Problems of Micro/Nanosystems Technologies (MNST) - Novosibirsk, Russia (2010.12.9-2010.12.11)] 2010 IEEE 2nd Russia School and Seminar on Fundamental Problems of Micro/Nanosystems Technologis (MNST) - Application of the sorption-frequency method in comparison with other methods for measurement of humidity nanoconcentrations in gases and liquids

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