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Adhesion characteristics of MEMS in microfluidic environments
Parker, E.E., Ashurst, W.R., Carraro, C., Maboudian, R.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2005.851867
Date:
October, 2005
File:
PDF, 667 KB
english, 2005