Reduction of Effective Sputtering Yield by Honeycomb...

Journal of Nuclear Science and Technology 1978 / 07 Vol. 15; Iss. 7

Reduction of Effective Sputtering Yield by Honeycomb Structures

ABE, Tetsuya, OBARA, Kenziro, NAKAMURA, Hiroo, SONE, Kazuho, OHTSUKA, Hidewo, YAMADA, Rayji, SAIDOH, Masahiro, SHIMIZU, Masatsugu
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Volume:
15
Language:
english
Journal:
Journal of Nuclear Science and Technology
DOI:
10.1080/18811248.1978.9735539
Date:
July, 1978
File:
PDF, 715 KB
english, 1978
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