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Reduction of Effective Sputtering Yield by Honeycomb Structures
ABE, Tetsuya, OBARA, Kenziro, NAKAMURA, Hiroo, SONE, Kazuho, OHTSUKA, Hidewo, YAMADA, Rayji, SAIDOH, Masahiro, SHIMIZU, MasatsuguVolume:
15
Language:
english
Journal:
Journal of Nuclear Science and Technology
DOI:
10.1080/18811248.1978.9735539
Date:
July, 1978
File:
PDF, 715 KB
english, 1978